{"id":3557,"date":"2016-09-02T01:13:03","date_gmt":"2016-09-02T01:13:03","guid":{"rendered":"http:\/\/41j.com\/blog\/?p=3557"},"modified":"2016-09-02T01:28:06","modified_gmt":"2016-09-02T01:28:06","slug":"random-sem-images-mcm68364-64kb-rom","status":"publish","type":"post","link":"https:\/\/41j.com\/blog\/2016\/09\/random-sem-images-mcm68364-64kb-rom\/","title":{"rendered":"Random SEM Images – MCM68364 64KB ROM"},"content":{"rendered":"

I wanted to make sure the SEM was still happily chugging away so picked up some cheap wafer fragments on eBay and did some imaging. Truth be told, I think I just enjoy throwing things in the SEM and seeing what they look like. If you have something you’d like imaged drop me a line (particularly if you’re from the hacker or maker community) and we can arrange to have it imaged. Currently samples need to be conductive as we don’t have a sputtering machine up and running here yet.<\/p>\n

Anyway… on to the images! Here’s a shot at the lowest magnification:<\/p>\n

\"20160812_151700.bmp\"<\/a>Honestly, it would probably just be better to use an optical microscope here. And in fact, the features on this chip are relatively big. But I do love the fact that with a SEM you can go all the way from 30x to 20000x.<\/p>\n

Here’s a random shot of part of the matrix, I’d guess this is something like a 1 micron process? Maybe sub-micron but not double digit nanometer. Pretty old stuff:<\/p>\n

\"20160812_143924.bmp\"<\/a><\/p>\n

After taking that image I zoomed out a bit. Thing about SEMs is that they’re often somewhat destructive. You can see that the die has been scared in that area. After that shot I lowered the acceleration voltage a bit…<\/p>\n

\"20160812_144854.bmp\"<\/a><\/p>\n

I’m guessing there’s a reason these wafers found their way onto eBay and not into a product.I assume this marking was produced by test jig to mark dies as faulty:<\/p>\n

\"20160812_145701.bmp\"<\/a><\/p>\n

Some more random shots showing the bonding pads, you can see there’s a bunch of (I guess addressing) logic around the pads and next to the ROM matrix:<\/p>\n

\"20160812_145454.bmp\"<\/a><\/p>\n

The corner where 4 dies meet, I just thought it looked kind of neat:<\/p>\n

\"20160812_150725.bmp\"<\/a><\/p>\n

Enhance:<\/p>\n

\"20160812_152114.bmp\"<\/a>Enhance:<\/p>\n

\"20160812_152305.bmp\"<\/a><\/p>\n

Track right, enhance 224 to 176<\/a>:<\/p>\n

\"20160812_152440.bmp\"<\/a>Track 45 right:<\/p>\n

\"20160812_152613.bmp\"<\/a><\/p>\n

I wanted to focus in on one feature, even if it was just random junk on the die and see what kind of resolution I could get.<\/p>\n

Enhance 34 to 46:<\/p>\n

\"20160812_152853.bmp\"<\/a><\/p>\n

Following images look further at the structures to the far right of the image.<\/p>\n

57,19. Things look so messy up close:<\/p>\n

\"20160812_153853.bmp\"<\/a><\/p>\n

Hmm not very interesting:<\/p>\n

\"20160812_154137.bmp\"<\/a><\/p>\n

I picked this random blob and zoomed in further. I assume these is just a random fabrication defect:<\/p>\n

\"20160812_153710.bmp\"<\/a><\/p>\n

15 to 24 Give me a hard copy right there:<\/p>\n

\"20160812_153456.bmp\"<\/a><\/p>\n

That’s a big\/small blob of something! But at least we’re at the nanometer scale now. Anyway there we go. Suggestions on things to throw in the SEM? let me know!<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n","protected":false},"excerpt":{"rendered":"

I wanted to make sure the SEM was still happily chugging away so picked up some cheap wafer fragments on eBay and did some imaging. Truth be told, I think I just enjoy throwing things in the SEM and seeing what they look like. If you have something you’d like imaged drop me a line […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","_jetpack_dont_email_post_to_subs":false,"_jetpack_newsletter_tier_id":0,"_jetpack_memberships_contains_paywalled_content":false,"_jetpack_memberships_contains_paid_content":false,"footnotes":"","jetpack_publicize_message":"","jetpack_publicize_feature_enabled":true,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","default_image_id":0,"font":"","enabled":false},"version":2}},"categories":[1],"tags":[],"class_list":["post-3557","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"","jetpack_shortlink":"https:\/\/wp.me\/p1RRoU-Vn","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/posts\/3557","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/comments?post=3557"}],"version-history":[{"count":4,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/posts\/3557\/revisions"}],"predecessor-version":[{"id":3605,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/posts\/3557\/revisions\/3605"}],"wp:attachment":[{"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/media?parent=3557"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/categories?post=3557"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/41j.com\/blog\/wp-json\/wp\/v2\/tags?post=3557"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}